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Jon Martindale / Tom's Hardware：Gigaphoton推出氖气回收系统，为DUV光刻晶圆厂实现50%回收率
原标题 · Jon Martindale / Tom's Hardware:Gigaphoton launches neon recycling system achieving 50% recovery rate for DUV lithography fabsSystem addresses critical neon supply constraints for…
该系统解决芯片制造商面临的氖气供应关键约束，不过随着EUV光刻规模扩大，需求可能下降。